DocumentCode :
1753943
Title :
Improve fab performance by using a unique system that support overall equipment efficiency methodology
Author :
Bakshi, Maya ; Segal, Tomer ; Bouhnik, Sylvain
Author_Institution :
Micron, Qiryat Gat, Israel
fYear :
2010
fDate :
18-20 Oct. 2010
Firstpage :
1
Lastpage :
4
Abstract :
In advanced semiconductor manufacturing, capital equipment drives the largest cost in producing products. The best way to increase productivity capabilities while using the same existing capacity (number of tools) is by maximizing the tools´ utilization or availability and minimizing the running loss. Indeed, sometimes the tools are not fully utilized. So why invest in more expensive capital equipment when you may be able to get the extra capacity benefits that you need by improving equipment performance?
Keywords :
integrated circuit manufacture; production equipment; production management; productivity; semiconductor industry; advanced semiconductor manufacturing; capital equipment; equipment performance; fab performance; overall equipment efficiency methodology; productivity; Argon; Decision support systems;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Semiconductor Manufacturing (ISSM), 2010 International Symposium on
Conference_Location :
Tokyo
ISSN :
1523-553X
Print_ISBN :
978-1-4577-0392-8
Electronic_ISBN :
1523-553X
Type :
conf
Filename :
5750212
Link To Document :
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