Title :
The method of modeling of cycle time and consumable cost of batch Tool
Author :
Tsukahara, Hiroyuki ; Imai, Tadashi ; Namiokai, Yoshiaki ; Hosoe, Hisashi
Author_Institution :
Panasonic Semicond. Eng. Co., Ltd., Uozu, Japan
Abstract :
This paper discusses a modeling method of tool cycle time and tool consumable cost in a batch tool. The relation between the tool cycle time, the tool consumable cost, and the batch waiting time of the batch tool is modeled by applying the queueing theory. This method optimizes the batch waiting time in consideration of the tool cycle time and the tool consumable cost of the batch tool.
Keywords :
batch processing (industrial); costing; machine tools; optimisation; queueing theory; semiconductor industry; batch tool; batch waiting time optimization; queueing theory; tool consumable cost; tool cycle time;
Conference_Titel :
Semiconductor Manufacturing (ISSM), 2010 International Symposium on
Conference_Location :
Tokyo
Print_ISBN :
978-1-4577-0392-8
Electronic_ISBN :
1523-553X
