Process optimization with the dynamic response analysis

Presented are the procedures of optimal process parameter extraction using given data sets and confirmation of this attempt. We applied dynamic response analyses developed in the quality engineering for the trench formation problem with RIE. It is necessary to adjust multiple process parameters of RIE to obtain a proper trench shape, which involves a huge amount of trial to find the optimal processing parameters. In our approach, response functions of the trench geometries associated with process parameters can be calculated using the data sets obtained during trial runs and estimation of the optimal process parameter set can be executed numerically and graphically.