Direct correlation between electrical failure and haze signals of DF (dark field) inspectors

A correlation between “haze” signals from DF (dark field) inspectors and electrical failure rates is reported. We provide experimental data that reflect a direct correlation between haze-signal values and the rate of electrically failing bits in advanced SRAM. This result is considered in the light of experiments including haze signals produced by wafers on which polystyrene latex (PSL) particles had been scattered. We also introduce a practical application of haze mapping to the QC of incoming materials based on the identified correlations.