DocumentCode
1753989
Title
Optimization of test parameters for the thermal resistance
Author
Murashima, Shigenobu ; Yamazaki, Shigehiro
Author_Institution
Renesas Kansai Semicond. Co., Ltd., Otsu, Japan
fYear
2010
fDate
18-20 Oct. 2010
Firstpage
1
Lastpage
4
Abstract
Thermal resistance called Rth is very important characteristics of power MOSFETs in terms of setting the heat free. ΔVF method has been generally applied on Rth measurement of power MOSFETs. It is difficult, however, to reject inferior products with high accuracy that have local void area in a soldering by only using ΔVF method. In this paper we succeeded in finding the accurate test parameter of ΔVF referring to die-bonding quality.
Keywords
power MOSFET; semiconductor device testing; soldering; die-bonding quality; optimization; power MOSFET; soldering; test parameters; thermal resistance; Q measurement;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Manufacturing (ISSM), 2010 International Symposium on
Conference_Location
Tokyo
ISSN
1523-553X
Print_ISBN
978-1-4577-0392-8
Electronic_ISBN
1523-553X
Type
conf
Filename
5750259
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