Effective Processes for Arc-Plasma Treatment in Large Vacuum Chambers of Technological Facilities

Characteristics and design features of electrode systems for sources of gas-discharge plasmas produced in an arc discharge in gas sustained by electron emission from a hot cathode and advanced vacuum-plasma facilities relying on them are presented. High values of the parameters and advantageous properties of the plasmas generated by the proposed sources in large vacuum volumes are obtained. Effective techniques and technological processes designed for surface modification of metal parts by the methods of cleaning, alloying (doping), and forming multicomponent composite coatings using low-pressure arc discharges are demonstrated.