Fabrication Process Yielding Saturated Nanowire Single-Photon Detectors With 24-ps Jitter

Author

Najafi, Faraz ; Dane, Andrew ; Bellei, Francesco ; Qingyuan Zhao ; Sunter, Kristen A. ; McCaughan, Adam N. ; Berggren, Karl K.

Author_Institution

Dept. of Electr. Eng. & Comput. Sci., Massachusetts Inst. of Technol., Cambridge, MA, USA

Volume

21

Issue

2

fYear

2015

fDate

March-April 2015

Firstpage

1

Lastpage

7

Abstract

We present an optimized fabrication process for superconducting nanowire single-photon detectors that allowed us to obtain a yield of ~70% for detectors based on 80-nm-wide niobium nitride nanowires. We fabricated detectors that showed 24-ps timing jitter and saturated detection efficiency without the need for cryogenic amplifiers, allowing for operation in a low-bias low-dark-count-rate regime while operating at maximum detection efficiency.

Keywords

infrared detectors; nanofabrication; nanophotonics; nanowires; niobium compounds; optical fabrication; superconducting photodetectors; timing jitter; fabrication process; low-bias low-dark-count-rate regime; niobium nitride nanowires; saturated detection efficiency; saturated nanowire single-photon detectors; superconducting nanowire single-photon detectors; time 24 ps; timing jitter; Detectors; Fabrication; Films; Gold; Photonics; Resists; Timing jitter; Infrared Photon Detectors; Niobium Nitride; SNSPDs; SSPDs; Single-Photon Detectors; Single-photon detectors; infrared photon detectors; niobium nitride;

fLanguage

English

Journal_Title

Selected Topics in Quantum Electronics, IEEE Journal of

Publisher

ieee

ISSN

1077-260X

Type

jour

DOI

10.1109/JSTQE.2014.2372054

Filename

6983540