Title :
A MEMS Bistable Device With Push-On–Push-Off Capability
Author :
Hen-Wei Huang ; Yao-Joe Yang
Author_Institution :
Dept. of Mech. Eng., Nat. Taiwan Univ., Taipei, Taiwan
Abstract :
This letter presents a novel MEMS bistable device that requires only one independent driving source for switching between its two stable states. The proposed device employs a mechanically push-on-push-off mechanism consisting of two curved beam structures. An integrated V-beam actuator (VBA) is used as the only actuation component. The proposed device can be easily realized on a silicon-on-insulator wafer by using the inductively coupled plasma (ICP) etching process with a single photomask. Preliminary measurement results show that a 30-ms pulse of 7.2 V applied to the VBA can drive the device from the off state to the on state, and a 50-ms pulse of 7.2 V can release the device from the on state back to the off state. Transient displacement results measured by using a vibrometer are also provided.
Keywords :
beams (structures); masks; microactuators; silicon-on-insulator; sputter etching; vibration measurement; ICP etching process; MEMS bistable device; actuation component; driving source; inductively-coupled plasma etching process; integrated V-beam actuator; integrated VBA; photomask; preliminary measurement; push-on-push-off capability; push-on-push-off mechanism; silicon-on-insulator wafer; stable states; time 30 ms; time 50 ms; transient displacement; two-curved beam structures; vibrometer; voltage 7.2 V; Actuators; Microelectromechanical systems; Micromechanical devices; Optical attenuators; Optical switches; Transient analysis; Bistable mechanism; V-beam actuator (VBA); lever; push-on–push-off;
Journal_Title :
Microelectromechanical Systems, Journal of
DOI :
10.1109/JMEMS.2012.2228165
