Electrohydrodynamic Jet Spraying Technique for Oxide Thin-Film Transistor

Author

Kwack, Young-Jin ; Choi, Woon-Seop

Author_Institution

Sch. of Display Eng., Hoseo Univ., Asan, South Korea

Volume

34

Issue

1

fYear

2013

fDate

Jan. 2013

Firstpage

78

Lastpage

80

Abstract

Electrohydrodynamic (EHD) jet is a printing technique using an electric field to create jetting droplets for the delivery of a liquid portion to a designated substrate. EHD jet spraying was applied to the preparation of a solution-processed zinc-tin-oxide thin-film transistor. The electrosprayed film was characterized by analytical methods. Electrical properties, such as a mobility of 4.89 cm²·V·s^-1, a threshold voltage of 7.17 V, a subthreshold slope of 0.44 V·dec^-1, and an on-to-off ratio of 10⁷, were obtained.

Keywords

electrohydrodynamics; ink jet printing; semiconductor thin films; spraying; thin film transistors; tin; zinc; EHD jet printing technique; Zn-Sn-O; electric field; electrical property; electrohydrodynamic jet spraying technique; electrosprayed film; jetting droplets; solution-processed zinc-tin-oxide thin-film transistor; voltage 7.17 V; Printing; Spraying; Substrates; Thin film transistors; Tin; Zinc; Electrohydrodynamic (EHD) jet; spray; thin-film transistor (TFT); zinc–tin oxide (ZTO);

fLanguage

English

Journal_Title

Electron Device Letters, IEEE

Publisher

ieee

ISSN

0741-3106

Type

jour

DOI

10.1109/LED.2012.2226557

Filename

6377234