DocumentCode
1755183
Title
Absorption of Urea Into Zeolite Layer Integrated With Microelectronic Circuits
Author
Fiorillo, Antonino S. ; Tiriolo, Raffaele ; Pullano, Salvatore Andrea
Author_Institution
Dept. of Health Sci., Magna Graecia Univ., Catanzaro, Italy
Volume
14
Issue
2
fYear
2015
fDate
42064
Firstpage
214
Lastpage
217
Abstract
A simple and efficient technique allows the direct application of a mixture of zeolite 3A and castor oil onto surfaces, at low temperatures. This same technique can also be used to fabricate iono-electronic devices on silicon wafers for biomedical purposes. In this paper, we investigate the use of a mixture of zeolite together with different vegetable oils aimed at obtaining thinner, more uniform, repeatable layers at even lower temperatures, which are capable of entrapping biological substances, specifically urea molecules. By choosing the proper mixture, the curing temperature can be optimized to make the process compatible with integrated circuit technology. A cold O2 -plasma treatment was used during experimentation to activate the zeolite thin layer on silicon, by removing the residual organic species. The absorption of urea molecules and its interaction with the zeolite framework was investigated through Fourier transform infrared spectroscopy.
Keywords
Fourier transform infrared spectroscopy; integrated circuits; nanoporous materials; plasma materials processing; vegetable oils; zeolites; Fourier transform infrared spectroscopy; biomedical purposes; castor oil; cold O2-plasma treatment; curing temperature; integrated circuit technology; iono-electronic devices; microelectronic circuits; residual organic species; silicon wafers; urea molecules absorption; vegetable oils; zeolite 3A; zeolite framework; zeolite thin layer; Absorption; Chemicals; Curing; Nanobioscience; Plasma temperature; Silicon; Vegetable oils; Biosensors; Infrared spectra; Nanoporous materials; Urea; Zeolite; infrared spectra; nanoporous materials; urea; zeolite;
fLanguage
English
Journal_Title
Nanotechnology, IEEE Transactions on
Publisher
ieee
ISSN
1536-125X
Type
jour
DOI
10.1109/TNANO.2014.2378892
Filename
6983583
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