• DocumentCode
    1755183
  • Title

    Absorption of Urea Into Zeolite Layer Integrated With Microelectronic Circuits

  • Author

    Fiorillo, Antonino S. ; Tiriolo, Raffaele ; Pullano, Salvatore Andrea

  • Author_Institution
    Dept. of Health Sci., Magna Graecia Univ., Catanzaro, Italy
  • Volume
    14
  • Issue
    2
  • fYear
    2015
  • fDate
    42064
  • Firstpage
    214
  • Lastpage
    217
  • Abstract
    A simple and efficient technique allows the direct application of a mixture of zeolite 3A and castor oil onto surfaces, at low temperatures. This same technique can also be used to fabricate iono-electronic devices on silicon wafers for biomedical purposes. In this paper, we investigate the use of a mixture of zeolite together with different vegetable oils aimed at obtaining thinner, more uniform, repeatable layers at even lower temperatures, which are capable of entrapping biological substances, specifically urea molecules. By choosing the proper mixture, the curing temperature can be optimized to make the process compatible with integrated circuit technology. A cold O2 -plasma treatment was used during experimentation to activate the zeolite thin layer on silicon, by removing the residual organic species. The absorption of urea molecules and its interaction with the zeolite framework was investigated through Fourier transform infrared spectroscopy.
  • Keywords
    Fourier transform infrared spectroscopy; integrated circuits; nanoporous materials; plasma materials processing; vegetable oils; zeolites; Fourier transform infrared spectroscopy; biomedical purposes; castor oil; cold O2-plasma treatment; curing temperature; integrated circuit technology; iono-electronic devices; microelectronic circuits; residual organic species; silicon wafers; urea molecules absorption; vegetable oils; zeolite 3A; zeolite framework; zeolite thin layer; Absorption; Chemicals; Curing; Nanobioscience; Plasma temperature; Silicon; Vegetable oils; Biosensors; Infrared spectra; Nanoporous materials; Urea; Zeolite; infrared spectra; nanoporous materials; urea; zeolite;
  • fLanguage
    English
  • Journal_Title
    Nanotechnology, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    1536-125X
  • Type

    jour

  • DOI
    10.1109/TNANO.2014.2378892
  • Filename
    6983583