Title :
Solar Blind Ultraviolet Photodetectors With High Dynamic Resistance Using Zn3Ta2O5 Layer
Author :
Chia-Hsun Chen ; Ching-Ting Lee
Author_Institution :
Dept. of Electr. Eng., Nat. Cheng Kung Univ., Tainan, Taiwan
Abstract :
The vapor cooling condensation system was utilized to deposit the homostructured n-ZnO:In/i-ZnO/p-ZnO:LiNO3 and heterostructured n-ZnO:In/i-Zn3Ta2O5/p-ZnO:LiNO3 on sapphire substrates. The zero bias dynamic resistance of the latter ones was improved to 2.43 × 1012 Ω compared with 7.94 × 1011 Ω of the former ones. Using the photoelectrochemical (PEC) oxidation method to treat the heterostructured n-ZnO:In/i-Zn3Ta2O5/p-ZnO:LiNO3 ultraviolet photodetectors, the zero bias dynamic resistance was further improved to 6.02 × 1012 Ω. The sensing and the noise performances of the ultraviolet photodetectors were effectively improved by the Zn3Ta2O5 absorption layer and the PEC oxidation method.
Keywords :
cooling; light absorption; lithium compounds; niobium compounds; optical noise; optical testing; oxidation; photodetectors; photoelectrochemistry; tantalum compounds; ultraviolet detectors; zinc compounds; ZnO:In-Zn3Ta2O5-ZnO:LiNO3; absorption layer; heterostructured ultraviolet photodetectors; high dynamic resistance; noise performances; optical sensing performances; photoelectrochemical oxidation method; sapphire substrates; solar blind ultraviolet photodetectors; vapor cooling condensation system; zero bias dynamic resistance; Absorption; Films; Noise; Oxidation; Photodetectors; Resistance; Zinc oxide; Dynamic resistance; Zn3Ta2O5 thin films; noise and specific detectivity; photoelectrochemical oxidation method; ultraviolet photodetectors; vapor cooling condensation system; zn3Ta2O5 thin films;
Journal_Title :
Photonics Technology Letters, IEEE
DOI :
10.1109/LPT.2015.2443502
