DocumentCode :
1759260
Title :
Micropump for Generation and Control of Vacuum Inside Miniature Devices
Author :
Grzebyk, Tomasz P. ; Gorecka-Drzazga, Anna ; Dziuban, Jan A. ; Zawada, A. ; Konarski, P.
Author_Institution :
Wroclaw Univ. of Technol., Wrocław, Poland
Volume :
23
Issue :
1
fYear :
2014
fDate :
Feb. 2014
Firstpage :
50
Lastpage :
55
Abstract :
The microengineered MEMS-type ion-sorption micropump with field-emission electron source has been shown. Effective emission properties of the carbon nanotubes cathode ensure satisfactory efficiency of residual gas ionization, showing possibility of active pumping of circa 0.05 cm3 volume down to 10-5 hPa. Measurement of ion current allows estimation of vacuum level inside the microcavity.
Keywords :
carbon nanotubes; cathodes; electron field emission; electron sources; ionisation; microcavities; micropumps; vacuum control; C; active pumping; carbon nanotubes cathode; effective emission properties; field-emission electron source; ion current measurement; ion-sorption micropump; microcavity; microengineered MEMS; miniature devices; residual gas ionization; vacuum control; vacuum generation; Anodes; Cathodes; Gettering; Glass; Micromechanical devices; Micropumps; Silicon; Field-emission electron source; MEMS; gas ionization; miniature pump;
fLanguage :
English
Journal_Title :
Microelectromechanical Systems, Journal of
Publisher :
ieee
ISSN :
1057-7157
Type :
jour
DOI :
10.1109/JMEMS.2013.2288926
Filename :
6664998
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=1759260
بازگشت