• DocumentCode
    1759578
  • Title

    ZnO Nanorod-Based Humidity Sensors With Fast Response

  • Author

    Soyoun Jung ; Taeksoo Ji

  • Author_Institution
    Samsung Display Co., Ltd., Youngin, South Korea
  • Volume
    35
  • Issue
    9
  • fYear
    2014
  • fDate
    Sept. 2014
  • Firstpage
    960
  • Lastpage
    962
  • Abstract
    Humidity sensors based on ZnO nanorods (NRs) have been developed using a Wheatstone bride (WB) configuration, where the ZnO NRs were selectively grown onto the one quadrant of the WB circuit. It turns out that the WB-based sensor possesses superior performances in terms of response and recovery time, and thermal stability in comparison with conventional types of resistive sensors. Thus, the WB sensor exhibits a fast response and recovery time (~1 s), and temperature-invariant behaviors over a broad range of temperatures up to 180 °C, which is likely because of the self-calibrating and error correction capabilities of the WB circuit itself.
  • Keywords
    II-VI semiconductors; calibration; error correction; humidity sensors; measurement errors; nanorods; nanosensors; thermal stability; wide band gap semiconductors; zinc compounds; WB circuit; WB-based sensor; Wheatstone bride; ZnO; error correction; humidity sensor; nanorods; recovery time; resistive sensor; response time; self-calibration; thermal stability; Humidity; Sensitivity; Sensor phenomena and characterization; Temperature sensors; Time factors; Zinc oxide; Wheatstone bridge; humidity sensor; humidity sensor.; nanorods; zinc oxide;
  • fLanguage
    English
  • Journal_Title
    Electron Device Letters, IEEE
  • Publisher
    ieee
  • ISSN
    0741-3106
  • Type

    jour

  • DOI
    10.1109/LED.2014.2335231
  • Filename
    6856151