DocumentCode :
1760875
Title :
An Ultra-Low Specific ON-Resistance LDMOST With Self-Driven Split Gate
Author :
Wenfang Du ; Xinjiang Lyu ; Wai Tung Ng ; Xingbi Chen
Author_Institution :
State Key Lab. of Electron. Thin Films & Integrated Devices of China, Univ. of Electron. Sci. & Technol. of China, Chengdu, China
Volume :
62
Issue :
4
fYear :
2015
fDate :
42095
Firstpage :
1230
Lastpage :
1234
Abstract :
An 
-Laterally Double Diffused Metal Oxide Semiconductor Field Effect Transistor (LDMOST) with self-driven split 
-top gate is studied. By integrating a low-voltage charge pump circuit, a constant positive voltage ( 
V) is self-generated in the OFF-state and applied to the split -top electrode in the ON-state. This voltage assists the accumulation of electrons near the surface of the 
-drift region. As a result, the specific ON-resistance 
is reduced without an increase in effective gate charge 
. Moreover, the adaptation of the optimum variation lateral doping enables a shorter -drift region length to support the same breakdown voltage. The simulation results indicate that for a 600 V device, the 
is 20.7 
. This is approximately five times smaller than a conventional double REduced SURface Field LDMOST.
Keywords :
MOSFET; charge pump circuits; electric breakdown; electrodes; semiconductor device models; semiconductor doping; breakdown voltage; constant positive voltage; gate charge; low-voltage charge pump circuit; n-drift region length; n-laterally double diffused metal oxide semiconductor field effect transistor; optimum variation lateral doping; p-top electrode; self-driven split gate; self-driven split p-top gate; ultralow specific on-resistance LDMOST; voltage 600 V; Capacitors; Charge pumps; Doping; Educational institutions; Electrodes; Logic gates; Resistance; Accumulated electrons; built-in charge pump; gate charge; specific ON-resistance; specific ON-resistance.;
fLanguage :
English
Journal_Title :
Electron Devices, IEEE Transactions on
Publisher :
ieee
ISSN :
0018-9383
Type :
jour
DOI :
10.1109/TED.2015.2406074
Filename :
7057656
Link To Document :
