A Twin Fiber Bragg Grating Probe for the Dimensional Measurement of Microholes

Author

Jiwen Cui ; Kunpeng Feng ; Yang Hu ; Junying Li ; Jiubin Tan

Author_Institution

Center of Ultra-Precision Optoelectron. Instrum., Harbin Inst. of Technol., Harbin, China

Volume

26

Issue

17

fYear

2014

fDate

Sept.1, 1 2014

Firstpage

1778

Lastpage

1781

Abstract

A fiber probe with a novel structure of twin fiber Bragg grating sensitive to both contacts along x-axis and z-axis is proposed for measurement of microholes with high aspect ratio. The main conundrums during the dimensional measurement of microholes with high aspect ratio, such as shadowing effect, limited probing space, and requirement of multidimensional tactile sense are well solved using the proposed probe. Sensing principle and decoupling algorithm has been verified through experiments. Experimental results indicate that the influence of manufacture defects and the misalignment between probe and measurement coordinates can be reduced through rotation and tilt calibration. The contact displacement sensitivity is 12.91 pm/μm and 49.75 pm/μm along x-axis and z-axis, respectively. A microhole with an aspect ratio of 10:1 can be measured using the proposed twin fiber Bragg grating probe.

Keywords

Bragg gratings; calibration; fibre optic sensors; micro-optics; microsensors; spatial variables measurement; tactile sensors; decoupling algorithm; fiber Bragg grating probe; high-aspect ratio; limited probing space; microhole dimensional measurement; multidimensional tactile sense; shadowing effect; tilt calibration; Calibration; Coordinate measuring machines; Fiber gratings; Optical fibers; Probes; Sensitivity; Dimensional measurement; micro holes with high aspect ratio; twin fiber Bragg grating probe;

fLanguage

English

Journal_Title

Photonics Technology Letters, IEEE

Publisher

ieee

ISSN

1041-1135

Type

jour

DOI

10.1109/LPT.2014.2336238

Filename

6857324