• DocumentCode
    1762301
  • Title

    RF Probe Technology: History and Selected Topics

  • Author

    Rumiantsev, Andrej ; Doerner, Ralf

  • Author_Institution
    Brandenburg Univ. of Technol. (BTU), Cottbus, Germany
  • Volume
    14
  • Issue
    7
  • fYear
    2013
  • fDate
    Nov.-Dec. 2013
  • Firstpage
    46
  • Lastpage
    58
  • Abstract
    Today, radio-frequency (RF) wafer probes play an important role in almost every step of the RF products lifecycle: from technology development, model parameter extraction, design verification, and debug to small-scale and final production test. By using RF probes, it became possible to measure true characteristics of the RF components at the wafer level. This halved research and development times and lowered the enormous costs of developing new products.
  • Keywords
    probes; semiconductor device measurement; RF probe technology; design verification; history; model parameter extraction; radiofrequency wafer probes; History; Microwave measurement; Probes; Radio frequency; Wafer scale integration;
  • fLanguage
    English
  • Journal_Title
    Microwave Magazine, IEEE
  • Publisher
    ieee
  • ISSN
    1527-3342
  • Type

    jour

  • DOI
    10.1109/MMM.2013.2280241
  • Filename
    6668970
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1762301