• DocumentCode
    1762454
  • Title

    Achieving reproducibility needed for manufacturing semiconductor tunnel devices

  • Author

    Shao, Chengcheng ; Sexton, James ; Missous, Mohamed ; Kelly, Michael J.

  • Author_Institution
    Dept. of Eng., Univ. of Cambridge, Cambridge, UK
  • Volume
    49
  • Issue
    10
  • fYear
    2013
  • fDate
    May 9 2013
  • Firstpage
    674
  • Lastpage
    675
  • Abstract
    Fifty years after tunnelling through semiconductor heterojunctions was originally investigated, the present authors are the first to demonstrate the required reproducibility, in wafer, between wafers in a given growth run, and from run to run, of the electrical properties required for manufacturing a microwave and millimetre-wave detector based on electron tunnelling through a thin semiconductor tunnel barrier layer.
  • Keywords
    microwave detectors; millimetre wave detectors; semiconductor device manufacture; electrical properties; microwave-wave detector manufacturing; millimetre-wave detector manufacturing; semiconductor heterojunctions; semiconductor tunnel device manufacturing; thin semiconductor tunnel barrier layer;
  • fLanguage
    English
  • Journal_Title
    Electronics Letters
  • Publisher
    iet
  • ISSN
    0013-5194
  • Type

    jour

  • DOI
    10.1049/el.2013.0782
  • Filename
    6528819