DocumentCode
1762454
Title
Achieving reproducibility needed for manufacturing semiconductor tunnel devices
Author
Shao, Chengcheng ; Sexton, James ; Missous, Mohamed ; Kelly, Michael J.
Author_Institution
Dept. of Eng., Univ. of Cambridge, Cambridge, UK
Volume
49
Issue
10
fYear
2013
fDate
May 9 2013
Firstpage
674
Lastpage
675
Abstract
Fifty years after tunnelling through semiconductor heterojunctions was originally investigated, the present authors are the first to demonstrate the required reproducibility, in wafer, between wafers in a given growth run, and from run to run, of the electrical properties required for manufacturing a microwave and millimetre-wave detector based on electron tunnelling through a thin semiconductor tunnel barrier layer.
Keywords
microwave detectors; millimetre wave detectors; semiconductor device manufacture; electrical properties; microwave-wave detector manufacturing; millimetre-wave detector manufacturing; semiconductor heterojunctions; semiconductor tunnel device manufacturing; thin semiconductor tunnel barrier layer;
fLanguage
English
Journal_Title
Electronics Letters
Publisher
iet
ISSN
0013-5194
Type
jour
DOI
10.1049/el.2013.0782
Filename
6528819
Link To Document