Physics-Based Circuit Model for a Water-Wall High-Temperature Arc Lamp Using Finite Volume Method

High-temperature arc lamps are used for thermal processing of semiconductor wafers. A vortex water wall on the inner surface of the lamp´s enclosure is used to provide cooling for the glass. It has been experimentally observed that, above certain levels of injected energy, the arc shows an unstable behavior and is self-extinguished. In this paper, a physics-based model for the water-wall high-temperature arc lamp is derived and implemented in the form of an equivalent electrical circuit. The equivalent circuit is then coupled to the flash power supply equivalent circuit to validate the derived model against experimental voltage and current waveforms.