• DocumentCode
    1764111
  • Title

    Carbon dioxide resistive sensor based on titanium oxide nanowires doped with potassium

  • Author

    Inhee Lee

  • Author_Institution
    Globalfoundries, Malta, NY, USA
  • Volume
    9
  • Issue
    4
  • fYear
    2014
  • fDate
    41730
  • Firstpage
    248
  • Lastpage
    250
  • Abstract
    Potassium-doped titanium oxide (TiO2) nanowires are fabricated by the moisture-assisted, direct oxidation of a thin film of titanium at 650°C. The influence of the fabrication conditions on the structure and morphology of the nanowires was investigated. It was shown that the presence of potassium (K) is necessary for the formation of the nanowires. The density of growth of the nanowires was high, and the lengths of the nanowires were tens of micrometres. The K-doped TiO2 nanowires showed the possibility of use as a sensing material because of their significant and consistent response to responding to carbon dioxide (CO2) gas. In addition, H2 plasma treatment improved the sensitivity of the CO2 gas sensor made of K-doped TiO2 nanowires. Although the sensing mechanism is not clear, this development suggests opportunities for the fabrication of simple and inexpensive CO2 microsensors with low power consumption.
  • Keywords
    carbon compounds; gas sensors; microfabrication; microsensors; nanofabrication; nanosensors; nanowires; oxidation; plasma materials processing; potassium; titanium compounds; CO2; H2 plasma treatment; TiO2:K; carbon dioxide gas; carbon dioxide resistive sensor; gas sensor; microsensors; moisture-assisted direct oxidation; potassium-doped titanium oxide nanowires; power consumption; sensing material; temperature 650 degC; titanium thin film;
  • fLanguage
    English
  • Journal_Title
    Micro & Nano Letters, IET
  • Publisher
    iet
  • ISSN
    1750-0443
  • Type

    jour

  • DOI
    10.1049/mnl.2013.0718
  • Filename
    6808610