Study of a Novel FP Microcavity With High Infrared Absorption

Author

Yufei Lv ; Wenjing Jiang ; Wen Ou

Author_Institution

Key Lab. of Microelectron. Devices & Integrated Technol., Inst. of Microelectron., Beijing, China

Volume

15

Issue

3

fYear

2015

fDate

42064

Firstpage

1756

Lastpage

1760

Abstract

To improve the performance of infrared (IR) detectors, a novel air Fabry-Perot (FP) microcavity with high IR absorption has been studied. Based on the theory of FP cavity, the model of air FP microcavity has been proposed. Its materials have been selected through optical simulation and experimental verification. Then, the optical property and structural stress of the FP cavity have been simulated by finite difference time domain method and finite-element method. In the experiment, the test structure of air FP cavity is fabricated to verify the theoretical results. According to the experimental results, the IR absorption of this structure can reach to 85%. In addition, the application of the air FP microcavity can improve the performance of IR detector obviously.

Keywords

finite difference time-domain analysis; finite element analysis; infrared detectors; light absorption; microcavities; microsensors; optical materials; optical sensors; IR absorption; IR detector; air FP microcavity; air Fabry-Perot microcavity; finite difference time domain method; finite-element method; infrared absorption; infrared detector; optical simulation; structural stress; Absorption; Cavity resonators; Detectors; Microcavities; Optical films; Optical reflection; Fabry-Perot microcavity; experimental verification; infrared absorption; simulation;

fLanguage

English

Journal_Title

Sensors Journal, IEEE

Publisher

ieee

ISSN

1530-437X

Type

jour

DOI

10.1109/JSEN.2014.2362301

Filename

6918413