Title :
Pull-in Voltage Estimation of Microcantilever Beams With Effects of Residual Stress Gradients and Capacitance Fringing
Author :
Kuang-Shun Ou ; Kuo-Shen Chen
Author_Institution :
Dept. of Mech. Eng., Nat. Cheng Kung Univ., Tainan, Taiwan
Abstract :
Pull-in characteristics of microcantilevers subjected to both residual stress gradients and electrostatic fringing are investigated by extending the previous JMEMS work by Ou using an energy approach. The analysis results agree with those performed by finite-element simulation very well. Finally, a semi-analytical engineering formula is also presented for MEMS design engineers.
Keywords :
beams (structures); cantilevers; finite element analysis; internal stresses; micromechanical devices; JMEMS work; MEMS design engineers; capacitance fringing; electrostatic fringing; energy approach; finite-element simulation; microcantilever beams; pull-in characteristics; pull-in voltage estimation; residual stress gradients; Atmospheric modeling; Electrostatics; Finite element analysis; Micromechanical devices; Residual stresses; Structural beams; Energy method; fringing effect; microcantilevers; pull-in; residual stress gradient;
Journal_Title :
Device and Materials Reliability, IEEE Transactions on
DOI :
10.1109/TDMR.2013.2279891
