Title :
Large Stroke Vertical PZT Microactuator With High-Speed Rotational Scanning
Author :
Zhen Qiu ; Choong-Ho Rhee ; Jongsoo Choi ; Wang, Thomas D. ; Oldham, Kenn R.
Author_Institution :
Dept. of Biomed. Eng., Univ. of Michigan, Ann Arbor, MI, USA
Abstract :
A thin-film piezoelectric microactuator using a novel combination of active vertical translational scanning and passive resonant rotational scanning is presented. Thin-film lead-zirconate-titanate unimorph bending beams surrounding a central platform provide nearly 200-μm displacement at 18 V with bandwidth greater than 200 Hz. Inside the platform, a mirror mount, or mirror surface, supported by silicon dioxide spring beams can be excited to resonance by low-voltage; high-frequency excitation of the outer PZT beams. Over ±5.5° mechanical resonance is obtained at 3.8 kHz and ±2 V. The combination of large translational vertical displacements and high-speed rotational scanning is intended to support real-time cross-sectional imaging in a dual axes confocal endomicroscope.
Keywords :
lead compounds; microactuators; oxygen compounds; piezoelectric actuators; piezoelectric thin films; silicon compounds; titanium compounds; zirconium compounds; PZT; active vertical translational scanning; dual axes confocal endomicroscope; high-frequency excitation; high-speed rotational scanning; large stroke vertical microactuator; large translational vertical displacements; mechanical resonance; mirror mount; mirror surface; passive resonant rotational scanning; real-time cross-sectional imaging; thin-film piezoelectric microactuator; thin-film unimorph bending beams; voltage -2 V; voltage 18 V; voltage 2 V; Imaging; Microactuators; Mirrors; Silicon; Silicon compounds; Springs; Microactuators; microscopy; piezoelectric transducers;
Journal_Title :
Microelectromechanical Systems, Journal of
DOI :
10.1109/JMEMS.2014.2303643
