DocumentCode
1765975
Title
Taking the heat
Volume
49
Issue
18
fYear
2013
fDate
August 29 2013
Firstpage
1114
Lastpage
1114
Abstract
A team at the University of Louisiana at Lafayette in the US have created a thin film of silica aerogel on a silicon wafer and have demonstrated its potential to make more efficient metal oxide semiconductor (MOX) gas sensors.
Keywords
MIS devices; aerogels; gas sensors; semiconductor thin films; thin film sensors; MOX gas sensors; SiO2; metal-oxide semiconductor gas sensors; silicon wafer; thin film; ultra-insulator silica aerogel;
fLanguage
English
Journal_Title
Electronics Letters
Publisher
iet
ISSN
0013-5194
Type
jour
DOI
10.1049/el.2013.2698
Filename
6587629
Link To Document