• DocumentCode
    1765975
  • Title

    Taking the heat

  • Volume
    49
  • Issue
    18
  • fYear
    2013
  • fDate
    August 29 2013
  • Firstpage
    1114
  • Lastpage
    1114
  • Abstract
    A team at the University of Louisiana at Lafayette in the US have created a thin film of silica aerogel on a silicon wafer and have demonstrated its potential to make more efficient metal oxide semiconductor (MOX) gas sensors.
  • Keywords
    MIS devices; aerogels; gas sensors; semiconductor thin films; thin film sensors; MOX gas sensors; SiO2; metal-oxide semiconductor gas sensors; silicon wafer; thin film; ultra-insulator silica aerogel;
  • fLanguage
    English
  • Journal_Title
    Electronics Letters
  • Publisher
    iet
  • ISSN
    0013-5194
  • Type

    jour

  • DOI
    10.1049/el.2013.2698
  • Filename
    6587629