Title :
RF MEMS control of planar microchamber for adaptive biosensing applications
Author :
Palego, Cristiano ; Molinero, David ; Cunningham, Shawn ; Morris, Art ; Seth, Marten
Author_Institution :
Sch. of Electron. Eng., Bangor Univ., Bangor, UK
Abstract :
Integration of radiofrequency micro-electromechanical (RF MEMS) tuning modules into a tested planar microchamber for agile biosensing pursposes is investigated. It is found that present MEMS chips enable enhancement of the achievable sensitivity in common sensing scenarios and without adding to technological complexity, although over a relatively narrow frequency range. Dedicated RF MEMS modules with higher capacitive resolution can be prospectively employed for even more flexible performance.
Keywords :
biosensors; micromechanical devices; MEMS chips; RF MEMS control; RF MEMS tuning modules; adaptive biosensing applications; agile biosensing pursposes; capacitive resolution; common sensing scenarios; radiofrequency microelectromechanical tuning modules; technological complexity; tested planar microchamber; Biosensors; Impedance; Micromechanical devices; Radio frequency; Sensitivity; Tuning; Biological cells; bioimpedance; biosensors; micro-electromechanicl systems; microfluidics; switch; tuning;
Conference_Titel :
Microwave Conference (EuMC), 2014 44th European
Conference_Location :
Rome
DOI :
10.1109/EuMC.2014.6986616
