Title :
Application of surface acoustic wave devices for acceleration sensing
Author :
Lukyanov, D. ; Shevchenko, S. ; Kukaev, A. ; Filippova, E. ; Khivrich, M.
Author_Institution :
Dept. of Laser Meas. & Navig. Syst., St.-Petersburg Electrotech. Univ., St. Petersburg, Russia
Abstract :
The fundamentals of the theory of surface acoustic waves (SAW) and the principles of construction of frequency differential converters on SAW are presented. SAW-based microaccelerometer design concept is discussed. Calculation of the microaccelerometer console optimal form for reducing the technological errors effect is completed. The technology of quartz packaging, the possibility of laser frequency adjustment and simultaneous formation of the resonator structures on the opposite sides of the console with the use of a laser are considered.
Keywords :
acceleration measurement; accelerometers; frequency convertors; microsensors; surface acoustic wave resonators; surface acoustic wave sensors; SAW-based microaccelerometer design concept; acceleration sensing; frequency differential converter; laser frequency adjustment; microaccelerometer console optimal form calculation; quartz packaging; resonator structures; surface acoustic wave device; technological error reduction; Lasers; Resonant frequency; Sensors; Stress; Surface acoustic waves; Transducers; laser frequency adjustment; micromechanical accelerometer (MMA); quartz packaging; surface acoustic wave (SAW);
Conference_Titel :
Mechanical Engineering, Automation and Control Systems (MEACS), 2014 International Conference on
Conference_Location :
Tomsk
Print_ISBN :
978-1-4799-6220-4
DOI :
10.1109/MEACS.2014.6986931
