Title :
Fully integrated CMOS capacitive sensor for Lab-on-Chip applications
Author :
Nabovati, Ghazal ; Ghafar-Zadeh, Ebrahim ; Mirzaei, Mohammad ; Ayala-Charca, Giancarlo ; Awwad, F. ; Sawan, Mohamad
Author_Institution :
Dept. of Electr. Eng., Polytech. Montreal, Montréal, QC, Canada
Abstract :
We present a new Charge Based Capacitance Measurement (CBCM) CMOS sensor for Lab-on-Chip applications. This integrated capacitive sensor consists of a fully differential capacitance to voltage converter, a sigma delta (ΣΔ) modulator, and interdigitated electrodes realized on top metal layer in 0.35 μm CMOS process. The proposed CMOS capacitive sensor offers higher dynamic-range (10 fF) and sensitivity (350 mV/fF) in comparison to our previously reported core-CBCM capacitive sensors. We proved this significant improvement by demonstrating the chemical solvent concentration measurements and discussing the potential applications in environmental monitoring and water safety applications.
Keywords :
CMOS integrated circuits; capacitance measurement; capacitive sensors; chemical variables measurement; environmental monitoring (geophysics); lab-on-a-chip; modulators; sigma-delta modulation; CMOS process; charge based capacitance measurement; chemical solvent concentration measurement; core CBCM capacitive sensor; differential capacitance to voltage converter; environmental monitoring; integrated CMOS capacitive sensor; interdigitated electrodes; lab-on-chip applications; sigma delta modulator; size 0.35 mum; water safety application; CMOS integrated circuits; Capacitance; Capacitive sensors; Ethanol; Modulation; Sensitivity;
Conference_Titel :
Circuits and Systems (ISCAS), 2014 IEEE International Symposium on
Conference_Location :
Melbourne VIC
Print_ISBN :
978-1-4799-3431-7
DOI :
10.1109/ISCAS.2014.6865108
