Title :
Developing a linear model of RF power generators with pseudo random binary signals (PRBS)
Author :
Haijun Fang ; Dianat, Sohail ; Mestha, Lalit K. ; Radomski, Aaron
Author_Institution :
ENI-Products Group, MKS Instrum., Rochester, NY, USA
Abstract :
In this paper, we will present an approach developing a linear model of a radio frequency (RF) power generator by using pseudo random binary signals (PRBS). We will compare two linear models obtained respectively by the PRBS approach and a traditional modeling approach. The result shows that both approaches achieve a very similar model of the RF power generator. Moreover, it can be shown that the PRBS approach is easily implemented in FPGA (Field-Programmable Gate Array) and can be adapted for the on-line system identification.
Keywords :
AC-DC power convertors; field programmable gate arrays; plasma materials processing; plasma production; plasma radiofrequency heating; FPGA; PRBS; RF power generators; field-programmable gate array; linear model; on-line system identification; pseudo random binary signals; radiofrequency power generator; Estimation; Rails; Silicon; Power Systems; Radio Frequency (RF);
Conference_Titel :
Control, Automation and Systems (ICCAS), 2014 14th International Conference on
Conference_Location :
Seoul
Print_ISBN :
978-8-9932-1506-9
DOI :
10.1109/ICCAS.2014.6987734