Sigma - Delta inspired control technique for the improvement of MEMS reliability

Author

Giounanlis, Panagiotis ; Blokhina, Elena ; Feely, Orla ; Gorreta, Sergi ; Pons Nin, Joan ; Dominguez, Manuel

Author_Institution

Sch. of Electr., Electron. & Commun. Eng., Univ. Coll. Dublin, Dublin, Ireland

fYear

2014

fDate

1-5 June 2014

Firstpage

1243

Lastpage

1246

Abstract

Dielectric charging of insulating films in micro-electromechanical systems (MEMS) has a crucial effect on the operation of those devices. In our previous work we have shown the feasibility of a new sigma-delta based control method which is able to maintain the dielectric charge at a desired level. The method is based on a smart actuation technique where the applied voltage is selected based on the state of the device. The purpose of this paper is to show the link between the method and sigma-delta modulation and to investigate the operation of the method in the space of device parameters.

Keywords

micromechanical devices; reliability; sigma-delta modulation; MEMS reliability improvement; dielectric charging; insulating films; microelectromechanical systems; sigma-delta inspired control technique; sigma-delta modulation; sigma-delta-based control method; smart actuation technique; Capacitance; Dielectrics; Electrodes; Micromechanical devices; Modulation; Oscillators; Sigma-delta modulation;

fLanguage

English

Publisher

ieee

Conference_Titel

Circuits and Systems (ISCAS), 2014 IEEE International Symposium on

Conference_Location

Melbourne VIC

Print_ISBN

978-1-4799-3431-7

Type

conf

DOI

10.1109/ISCAS.2014.6865367

Filename

6865367