DocumentCode
1769379
Title
15 mW of CW emission at 193 nm using the crystal KBBF
Author
Scholz, Matthias ; Opalevs, Dmitrijs ; Stuhler, Jurgen ; Leisching, Patrick ; Kaenders, Wilhelm ; Guiling Wang ; Xiaoyang Wang ; Rukang Li ; Chuangtian Chen
Author_Institution
TOPTICA Photonics AG, Gräfelfing, Germany
fYear
2014
fDate
8-13 June 2014
Firstpage
1
Lastpage
2
Abstract
We report on a narrow-band continuous-wave laser source in the deep-ultraviolet with an output power of > 15 mW at 193 nm. We see applications of this laser source in semiconductor metrology and high-resolution spectroscopy.
Keywords
beryllium compounds; measurement by laser beam; potassium compounds; solid lasers; spectroscopy; CW emission; KBBF; crystal KBBF; deep-ultraviolet range; high-resolution spectroscopy; potassium fluoro-beryllo borate; power 15 mW; semiconductor metrology; wavelength 193 nm;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics (CLEO), 2014 Conference on
Conference_Location
San Jose, CA
Type
conf
Filename
6988301
Link To Document