Title :
Ultrafast laser processing and metrology
Author :
Nomaru, Keiji ; Morikazu, Hiroshi ; Takahashi, Koichi
Author_Institution :
DISCO Corp., Tokyo, Japan
Abstract :
Precisely controlled blind via-holes were formed in multilayer substrates by an ultrafast laser. A LIBS detector integrated into the laser processing machine realizes the full potential of the ultrafast laser.
Keywords :
high-speed optical techniques; laser materials processing; measurement by laser beam; LIBS detector; laser metrology; laser processing machine; multilayer substrates; precisely controlled blind via-holes; ultrafast laser processing; Laser beam cutting; Materials; Monitoring; Optical surface waves; Surface emitting lasers; Surface treatment;
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2014 Conference on
Conference_Location :
San Jose, CA
