DocumentCode
1769542
Title
Femtosecond pulses for 3-D surface measurement of microelectronic step-structures
Author
Young-Jin Kim ; Woo-Deok Joo ; Jiyong Park ; Seungman Kim ; Seung-Woo Kim
Author_Institution
Dept. of Mech. Eng., Ultrafast Opt. for Ultraprecision Technol. Res. Group, Korea Adv. Inst. of Sci. & Technol., Daejeon, South Korea
fYear
2014
fDate
8-13 June 2014
Firstpage
1
Lastpage
2
Abstract
We present a fast and precise 3-D measurement of microelectronic step-structures over a wide field-of-view by utilizing high spatial coherence, low temporal coherence and repetition rate tunablility of femtosecond laser pulses.
Keywords
high-speed optical techniques; integrated circuit testing; measurement by laser beam; surface topography measurement; 3D surface measurement; femtosecond laser pulses; femtosecond pulses; high spatial coherence; low temporal coherence; microelectronic step-structures; repetition rate tunablility; Measurement by laser beam; Microelectronics; Optical interferometry; Optical variables measurement; Semiconductor device measurement; Ultrafast electronics; Ultrafast optics;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics (CLEO), 2014 Conference on
Conference_Location
San Jose, CA
Type
conf
Filename
6988387
Link To Document