DocumentCode :
1769616
Title :
3D Finite Element Schrödinger equation corrected Monte Carlo simulations of nanoscale FinFETs
Author :
Nagy, Daniel ; Elmessary, Muhammad A. ; Aldegunde, Manuel ; Lindberg, Jari ; Dettmer, W. ; Peric, Djordje ; Loureiro, Antonio ; Kalna, Karol
Author_Institution :
ESDC, Swansea Univ., Swansea, UK
fYear :
2014
fDate :
3-6 June 2014
Firstpage :
1
Lastpage :
4
Abstract :
A 3D Finite Element Monte Carlo simulation with 2D Schrödinger based quantum correction are employed to forecast the performance of SOI Si FinFET devices scaled to gate length of 10.7 nm. The performance of these devices are greatly affected by the exact device geometry and thus the accurate description of cross-sections is essential. We chose three cross-sections: rectangular (REC), wide- (WTRI) and narrow-triangular (NTRI), with rounded corners, in 〈100〉 and 〈110〉 channel orientations. We found that the REC FinFETs give a larger drive current per perimeter than the WTRI (8%) and NTRI (26%) ones but are outperformed by the NTRI devices when normalised by the channel area [WTRI (18%) and REC (20%)]. The sub-threshold slopes are about 71, 69 and 66 mV/dec for REC, WTRI and NTRI, respectively.
Keywords :
MOSFET; Monte Carlo methods; Schrodinger equation; elemental semiconductors; finite element analysis; nanoelectronics; semiconductor device models; silicon; silicon-on-insulator; 2D Schrödinger based quantum correction; 3D finite element Schrödinger equation; REC; REC FinFETs; SOI silicon FinFET devices; Si; channel orientations; corrected Monte Carlo simulations; device geometry; nanoscale FinFETs; narrow-triangular NTRI; rectangular cross-sections; size 10.7 nm; sub-threshold slopes; wide-WTRI; Equations; FinFETs; Iron; Logic gates; Mathematical model; Shape; Three-dimensional displays; FinFET; Finite Elements; Monte Carlo; Schrödinger equation;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Computational Electronics (IWCE), 2014 International Workshop on
Conference_Location :
Paris
Type :
conf
DOI :
10.1109/IWCE.2014.6865822
Filename :
6865822
Link To Document :
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