Development of a CMOS compatible biophotonics platform based on SiN nanophotonic waveguides

Author

Neutens, Pieter ; Claes, Tom ; Jansen, Roelof ; Subramanian, Ananth ; Ul Hasan, Mahmud ; Rochus, Veronique ; Shirley, Finub James ; Du Bois, Bert ; Helin, Philippe ; Severi, Simone ; Leyssens, Kenny ; Dhakal, Ashim ; Peyskens, Frederic ; Selvaraja, Shanka

Author_Institution

imec, Leuven, Belgium

fYear

2014

fDate

8-13 June 2014

Firstpage

1

Lastpage

2

Abstract

We report on the development of low-loss photonic components fabricated in low-temperature PECVD SiN for the development of a CMOS compatible biophotonics platform. We discuss modeling and experimental demonstration of strip waveguides, MMI and evanescent couplers, fractal trees for power distribution and AWGs and waveguide-integrated resonators as wavelength selective components.

Keywords

CMOS integrated circuits; arrayed waveguide gratings; bio-optics; integrated optics; integrated optoelectronics; nanobiotechnology; nanophotonics; optical couplers; optical fabrication; optical resonators; optical waveguides; plasma CVD; silicon compounds; AWG; CMOS compatible biophotonics platform; MMI; SiN; arrayed waveguide grating; evanescent couplers; fractal trees; low-loss photonic components; low-temperature PECVD SiN; multimode Interference; nanophotonic waveguides; plasma-enhanced chemical vapour deposition; power distribution; strip waveguides; waveguide-integrated resonators; wavelength selective components; Arrayed waveguide gratings; Couplers; Loss measurement; Optical device fabrication; Photonics; Silicon compounds;

fLanguage

English

Publisher

ieee

Conference_Titel

Lasers and Electro-Optics (CLEO), 2014 Conference on

Conference_Location

San Jose, CA

Type

conf

Filename

6988942