Title :
Demonstration and fabrication of electro-optic CaxBa1−xNb2O6 (CBN) thin-film based rib waveguide structure
Author :
Fesharaki, Faezeh ; Hossain, Nadir ; Vigne, Sebastien ; Margot, Joelle ; Ke Wu ; Chaker, Mohamed
Author_Institution :
Poly-Grames Res. Center, Ecole Polytech. de Montreal, Montreal, QC, Canada
Abstract :
The design, simulation, optimization and experimental demonstration of an electro-optic SiO2-CBN-MgO rib waveguide structure are reported in this paper. The proposed structure is modeled and optimized by simulations. CBN thin film is deposited epitaxially by a pulsed laser deposition technique. The CBN rib waveguide structure is patterned using plasma etching. The fabricated waveguides are characterized and the measured wave profiles are compared with simulated results. The agreement between simulation and experiment is found remarkably good, thus validating our design approach.
Keywords :
barium compounds; calcium compounds; electro-optical devices; epitaxial layers; optical films; pulsed laser deposition; rib waveguides; sputter etching; CBN thin film; SiO2-CaxBa1-xNb2O6-MgO; electro-optic thin-film; plasma etching; pulsed laser deposition; rib waveguide structure; wave profiles; Biological system modeling; Electrooptical waveguides; Etching; Optical device fabrication; Optical films;
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2014 Conference on
Conference_Location :
San Jose, CA
