Title :
Laser crystallization of silicon on lithium niobate
Author :
Martinez, Gina ; Zisis, G. ; Franz, Y. ; Healy, Noel ; Peacock, Anna C. ; Chong, H.M.H. ; Grech, D. ; Mailis, S.
Author_Institution :
Optoelectron. Res. Centre, Univ. of Southampton, Southampton, UK
Abstract :
Localized laser heating of amorphous Si deposited on LiNbO3 results in crystallization of the Si over-layer and the formation of a waveguide in the LiNbO3 substrate that supports guided modes in the visible and IR.
Keywords :
amorphous semiconductors; crystallisation; elemental semiconductors; infrared spectra; laser materials processing; lithium compounds; optical fabrication; optical waveguides; silicon; visible spectra; IR spectra; LiNbO3; Si; laser crystallization; lithium niobate; localized laser heating; optical channel waveguide; visible spectra; Films; Heating; Lithium niobate; Optical waveguides; Silicon; Substrates; Waveguide lasers;
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2014 Conference on
Conference_Location :
San Jose, CA
