Title :
A capacitance detection circuit for on-chip microparticle manipulation
Author :
Yamane, Rie ; Iwasaki, Hirosuke ; Dei, Yoshiaki ; Ji Cui ; Matsuoka, Toshimasa
Author_Institution :
Grad. Sch. of Eng., Osaka Univ., Suita, Japan
Abstract :
This study proposes a capacitance detection circuit for on-chip microparticle manipulation. The designed circuit employs the charge-based capacitance measurement technique to convert a capacitance value to a digital output code. Experimental results reveal capacitance measurement within error of 4 fF.
Keywords :
capacitance measurement; charge measurement; detector circuits; capacitance 4 fF; capacitance detection circuit; charge-based capacitance measurement technique; digital output code; on-chip microparticle manipulation; Capacitance; Capacitance measurement; Dielectrophoresis; MOS devices; Mirrors; Sensors; System-on-chip; CBCM; capacitance detection circuit; dielectrophoresis; manipulation; microparticle;
Conference_Titel :
Future of Electron Devices, Kansai (IMFEDK), 2014 IEEE International Meeting for
Conference_Location :
Kyoto
Print_ISBN :
978-1-4799-3614-4
DOI :
10.1109/IMFEDK.2014.6867083
