• DocumentCode
    1770979
  • Title

    Rheology printing of oxide transistors

  • Author

    Shimoda, Tatsuya

  • Author_Institution
    Sch. of Mater. Sci., Japan Adv. Inst. of Sci. & Technol., Nomi, Japan
  • fYear
    2014
  • fDate
    2-4 July 2014
  • Firstpage
    49
  • Lastpage
    52
  • Abstract
    A new precise printing method for device fabrication was developed. It is called `nano-Rheology Printing´, because it is using rheological nature of oxide-gels and can be adapted to nano-sized patterning. Two types of oxide TFTs having a channel length of 0.5 μm were successfully fabricated and their good properties were demonstrated. Now this technology is being applied for an AM-FPD application.
  • Keywords
    gels; printing; thin film transistors; AM-FPD application; channel length; device fabrication; nano-rheology printing method; nano-sized patterning; oxide TFTs; oxide transistors; oxide-gels; size 0.5 mum; Films; Indium tin oxide; Logic gates; Printing; Substrates; Thin film transistors;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Active-Matrix Flatpanel Displays and Devices (AM-FPD), 2014 21st International Workshop on
  • Conference_Location
    Kyoto
  • Type

    conf

  • DOI
    10.1109/AM-FPD.2014.6867119
  • Filename
    6867119