Title :
Calcium test of highly efficient gas barrier films fabricated by atomic layer deposition
Author :
Ching-Ming Hsu ; Wen-Tuan Wu ; Kun-Chi Wu ; In-Sin Tseng ; Dan-Cheng Kong ; Hui-En Yin
Author_Institution :
Grad. Sch. of Electro-Opt. Eng., Southern Taiwan Univ. of Sci. & Technol., Tainan, Taiwan
Abstract :
A calcium (Ca) test method was modified to measure water vapor transmission rate (WVTR) of PETs coated with gas barrier layers by atomic layer deposition (ALD). A 400-ALD-layer/PET was measured to have a WVTR of 1.2×10-2 g/m2/day, 300 times lower than the bare PET substrate, and lifetime of OLED devices fabricated on it was improved by a factor of 2.4 compared with that on 200-ALD-layer/PET. The modified Ca test was demonstrated to be a more accurate evaluation tool for developing highly efficient gas barrier film for plastic substrates.
Keywords :
atomic layer deposition; organic light emitting diodes; polymer films; OLED devices; atomic layer deposition; bare PET substrate; calcium test; gas barrier films; water vapor transmission rate; Calcium; Degradation; Films; Glass; Organic light emitting diodes; Positron emission tomography; Substrates;
Conference_Titel :
Active-Matrix Flatpanel Displays and Devices (AM-FPD), 2014 21st International Workshop on
Conference_Location :
Kyoto
DOI :
10.1109/AM-FPD.2014.6867195
