DocumentCode :
1771120
Title :
Formation of quasi-single-crystal Ge on plastic by nucleation-controlled Au-induced layer-exchange growth for flexible electronics
Author :
Jong-Hyeok Park ; Miyao, Masanobu ; Sadoh, T.
Author_Institution :
Dept. of Electron., Kyushu Univ., Fukuoka, Japan
fYear :
2014
fDate :
2-4 July 2014
Firstpage :
291
Lastpage :
294
Abstract :
A low-temperature (≤250oC) formation technique of orientation-controlled large-grain Ge thin films on insulator is desirable for realization of advanced flexible electronics. To achieve this, the Au-induced crystallization technique combined with inter-diffusion-control and interface-energy-modulation techniques has been investigated. Consequently, selective formation of (111)-or (100)-oriented large-grain (>20 μm) Ge crystals on insulator have been realized. Moreover, formation of (111)-oriented large-grain Ge crystals directly on plastic substrates is demonstrated. This technique facilitates realization of future flexible electronics.
Keywords :
chemical interdiffusion; elemental semiconductors; germanium; gold; nucleation; plasticity; quasicrystals; semiconductor growth; semiconductor thin films; (100)-oriented large-grain crystals; (111)-oriented large-grain crystals; Ge-Au; flexible electronics; interdiffusion-control; interface-energy-modulation; low-temperature formation; nucleation-controlled Au-induced layer-exchange growth; orientation-controlled large-grain thin films; plastic substrate; quasisingle-crystal; Aluminum oxide; Annealing; Crystals; Films; Gold; Plastics; Substrates;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Active-Matrix Flatpanel Displays and Devices (AM-FPD), 2014 21st International Workshop on
Conference_Location :
Kyoto
Type :
conf
DOI :
10.1109/AM-FPD.2014.6867200
Filename :
6867200
Link To Document :
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