DocumentCode
1771131
Title
Ultrahigh frequency surface acoustic wave modulation of optical resonators
Author
Tadesse, Semere A. ; Mo Li
Author_Institution
Sch. of Phys. & Astron., Univ. of Minnesota, Minneapolis, MN, USA
fYear
2014
fDate
8-13 June 2014
Firstpage
1
Lastpage
2
Abstract
A piezoelectric aluminum nitride film on oxidized silicon wafer is used to realize high frequency surface acoustic wave devices. Optical ring resonator is integrated with the surface acoustic wave device to demonstrate a high speed acousto-optic modulation.
Keywords
acousto-optical modulation; aluminium compounds; elemental semiconductors; integrated optics; optical resonators; piezoelectric thin films; silicon; surface acoustic wave devices; AlN-Si; high speed acousto-optic modulation; optical resonators; optical ring resonator; oxidized silicon wafer; piezoelectrc aluminum nitride film; surface acoustic wave devices; ultrahigh frequency surface acoustic wave modulation; Modulation; Optical ring resonators; Optical surface waves; Optical waveguides; Surface acoustic wave devices; Surface acoustic waves;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics (CLEO), 2014 Conference on
Conference_Location
San Jose, CA
Type
conf
Filename
6989277
Link To Document