Title :
Anisotropically etched silicon surfaces for planar plasmonic terahertz guidedwave devices
Author :
Kumar, Girish ; Shanshan Li ; Jadidi, Mohammad M. ; Murphy, Thomas E.
Author_Institution :
Dept. of Phys., Indian Inst. of Technol. Guwahati, Guwahati, India
Abstract :
We report a terahertz waveguide fabricated from doped crystalline silicon. Anisotropic chemically etching is used to produce a periodic array of concave pyramidal troughs in the silicon that provide confinement in both transverse directions.
Keywords :
optical fabrication; optical materials; optical planar waveguides; semiconductor doping; silicon; terahertz wave devices; Si:B; anisotropic chemically etching; anisotropically etched silicon surfaces; concave pyramidal troughs; doped crystalline silicon; periodic array; planar plasmonic terahertz guided wave devices; terahertz waveguide fabrication; transverse directions; Optical device fabrication; Optical surface waves; Optical waveguides; Resonant frequency; Silicon; Surface waves;
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2014 Conference on
Conference_Location :
San Jose, CA
