Title :
Design and fabrication of optomechanical crystal nanobeam cavity with high optomechanical coupling rate
Author :
Yongzhuo Li ; Kaiyu Cui ; Xue Feng ; Yidong Huang ; Zhilei Huang ; Fang Liu ; Wei Zhang
Author_Institution :
Dept. of Electron. Eng., Tsinghua Univ., Beijing, China
Abstract :
An optomechanical crystal nanobeam cavity with high optomechanical coupling rate is proposed and fabricated. Only by adjusting the radius of the air holes, the cavity realizes an optomechanical coupling rate as high as 1.24 MHz.
Keywords :
laser beams; nanophotonics; optical design techniques; optical fabrication; air hole radius; optomechanical coupling rate; optomechanical crystal nanobeam cavity design; optomechanical crystal nanobeam cavity fabrication; Cavity resonators; Couplings; Crystals; Optical attenuators; Optical coupling; Optical device fabrication; Photonic crystals;
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2014 Conference on
Conference_Location :
San Jose, CA
