DocumentCode
1771460
Title
Simple microfluidic integration of 3D optical sensors based on solvent immersion lithography
Author
Vasdekis, Andreas E. ; Grate, J.W. ; Konopka, A.E. ; Xantheas, S.S. ; Chang, T.-M.
Author_Institution
Pacific Northwest Nat. Lab., Richland, WA, USA
fYear
2014
fDate
8-13 June 2014
Firstpage
1
Lastpage
2
Abstract
We will present Solvent Immersion Lithography (SIL) for microsystem prototyping in less than one minute. Our focus will primarily be on 3D optical sensor integration for biological applications in microfluidics and chemical microreactors.
Keywords
bioMEMS; biological techniques; immersion lithography; integrated optics; micro-optomechanical devices; microfluidics; microreactors; optical sensors; 3D optical sensors; SIL; biological applications; chemical microreactors; microfluidics; microsystem prototyping; simple microfluidic integration; solvent immersion lithography; Lithography; Microfluidics; Optical imaging; Optical sensors; Plastics; Solvents;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics (CLEO), 2014 Conference on
Conference_Location
San Jose, CA
Type
conf
Filename
6989443
Link To Document