Title :
Simple microfluidic integration of 3D optical sensors based on solvent immersion lithography
Author :
Vasdekis, Andreas E. ; Grate, J.W. ; Konopka, A.E. ; Xantheas, S.S. ; Chang, T.-M.
Author_Institution :
Pacific Northwest Nat. Lab., Richland, WA, USA
Abstract :
We will present Solvent Immersion Lithography (SIL) for microsystem prototyping in less than one minute. Our focus will primarily be on 3D optical sensor integration for biological applications in microfluidics and chemical microreactors.
Keywords :
bioMEMS; biological techniques; immersion lithography; integrated optics; micro-optomechanical devices; microfluidics; microreactors; optical sensors; 3D optical sensors; SIL; biological applications; chemical microreactors; microfluidics; microsystem prototyping; simple microfluidic integration; solvent immersion lithography; Lithography; Microfluidics; Optical imaging; Optical sensors; Plastics; Solvents;
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2014 Conference on
Conference_Location :
San Jose, CA
