• DocumentCode
    1771665
  • Title

    Wideband-tunable optical resonators on double-layer SOI platforms using electrostatic actuation

  • Author

    Dehghannasiri, Roozbeh ; Eftekhar, Ali Asghar ; Sodagar, Majid ; Adibi, Ali

  • Author_Institution
    Sch. of Electr. & Comput. Eng., Georgia Inst. of Technol., Atlanta, GA, USA
  • fYear
    2014
  • fDate
    8-13 June 2014
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    We present mechanically-tunable microdisk resonators using electrostatic actuation in double-layer-SOI material platform. The possibility of achieving resonance wavelength shifts as-high-as 5.5 nm/volt and 1.35 nm/nm over a wavelength tuning range of 35 nm is demonstrated.
  • Keywords
    electrostatic actuators; integrated optoelectronics; micro-optomechanical devices; micromechanical resonators; optical resonators; optical tuning; silicon-on-insulator; Si; double-layer-SOI material platform; electrostatic actuation; mechanically-tunable microdisk resonators; resonance wavelength shifts; wavelength 35 nm; wavelength tuning range; wideband-tunable optical resonators; Electrodes; Optical interconnections; Optical resonators; Optical switches; Silicon; Tuning;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics (CLEO), 2014 Conference on
  • Conference_Location
    San Jose, CA
  • Type

    conf

  • Filename
    6989548