Title :
Wideband-tunable optical resonators on double-layer SOI platforms using electrostatic actuation
Author :
Dehghannasiri, Roozbeh ; Eftekhar, Ali Asghar ; Sodagar, Majid ; Adibi, Ali
Author_Institution :
Sch. of Electr. & Comput. Eng., Georgia Inst. of Technol., Atlanta, GA, USA
Abstract :
We present mechanically-tunable microdisk resonators using electrostatic actuation in double-layer-SOI material platform. The possibility of achieving resonance wavelength shifts as-high-as 5.5 nm/volt and 1.35 nm/nm over a wavelength tuning range of 35 nm is demonstrated.
Keywords :
electrostatic actuators; integrated optoelectronics; micro-optomechanical devices; micromechanical resonators; optical resonators; optical tuning; silicon-on-insulator; Si; double-layer-SOI material platform; electrostatic actuation; mechanically-tunable microdisk resonators; resonance wavelength shifts; wavelength 35 nm; wavelength tuning range; wideband-tunable optical resonators; Electrodes; Optical interconnections; Optical resonators; Optical switches; Silicon; Tuning;
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2014 Conference on
Conference_Location :
San Jose, CA
