DocumentCode
1771665
Title
Wideband-tunable optical resonators on double-layer SOI platforms using electrostatic actuation
Author
Dehghannasiri, Roozbeh ; Eftekhar, Ali Asghar ; Sodagar, Majid ; Adibi, Ali
Author_Institution
Sch. of Electr. & Comput. Eng., Georgia Inst. of Technol., Atlanta, GA, USA
fYear
2014
fDate
8-13 June 2014
Firstpage
1
Lastpage
2
Abstract
We present mechanically-tunable microdisk resonators using electrostatic actuation in double-layer-SOI material platform. The possibility of achieving resonance wavelength shifts as-high-as 5.5 nm/volt and 1.35 nm/nm over a wavelength tuning range of 35 nm is demonstrated.
Keywords
electrostatic actuators; integrated optoelectronics; micro-optomechanical devices; micromechanical resonators; optical resonators; optical tuning; silicon-on-insulator; Si; double-layer-SOI material platform; electrostatic actuation; mechanically-tunable microdisk resonators; resonance wavelength shifts; wavelength 35 nm; wavelength tuning range; wideband-tunable optical resonators; Electrodes; Optical interconnections; Optical resonators; Optical switches; Silicon; Tuning;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics (CLEO), 2014 Conference on
Conference_Location
San Jose, CA
Type
conf
Filename
6989548
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