Title :
1-to-32 H-tree optical distribution on adhesively bonded silicon nanomembrane
Author :
Yang Zhang ; Xiaochuan Xu ; Kwong, David ; Covey, John ; Hosseini, Amir ; Chen, Ray T.
Author_Institution :
Dept. of Electr. & Comput. Eng., Univ. of Texas at Austin, Austin, TX, USA
Abstract :
We developed an adhesive bonding process to integrate silicon nanomembranes onto silicon chips. A grating-coupled 1-to-32 H-tree optical distribution is experimentally demonstrated with an excess loss of 2.2 dB and a uniformity of 0.72 dB.
Keywords :
adhesive bonding; elemental semiconductors; integrated optoelectronics; membranes; optical interconnections; silicon; Si; adhesive bonding process; adhesively bonded silicon nanomembrane; grating-coupled 1-to-32 H-tree optical distribution; silicon chips; Integrated optics; Optical coupling; Optical device fabrication; Optical imaging; Optical polarization; Optical waveguides; Silicon;
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2014 Conference on
Conference_Location :
San Jose, CA
