• DocumentCode
    1771740
  • Title

    1-to-32 H-tree optical distribution on adhesively bonded silicon nanomembrane

  • Author

    Yang Zhang ; Xiaochuan Xu ; Kwong, David ; Covey, John ; Hosseini, Amir ; Chen, Ray T.

  • Author_Institution
    Dept. of Electr. & Comput. Eng., Univ. of Texas at Austin, Austin, TX, USA
  • fYear
    2014
  • fDate
    8-13 June 2014
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    We developed an adhesive bonding process to integrate silicon nanomembranes onto silicon chips. A grating-coupled 1-to-32 H-tree optical distribution is experimentally demonstrated with an excess loss of 2.2 dB and a uniformity of 0.72 dB.
  • Keywords
    adhesive bonding; elemental semiconductors; integrated optoelectronics; membranes; optical interconnections; silicon; Si; adhesive bonding process; adhesively bonded silicon nanomembrane; grating-coupled 1-to-32 H-tree optical distribution; silicon chips; Integrated optics; Optical coupling; Optical device fabrication; Optical imaging; Optical polarization; Optical waveguides; Silicon;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics (CLEO), 2014 Conference on
  • Conference_Location
    San Jose, CA
  • Type

    conf

  • Filename
    6989581
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1771740