Title :
Very large scale integrated photonics (VLSI-P)
Author :
Watts, Michael R. ; Jie Sun ; Timurdogan, Erman ; Hosseini, Ehsan S. ; Sorace-Agaskar, Cheryl ; Yaacobi, Ami ; Zhan Su ; Moresco, Michele ; Purnawirman ; Bradley, Jonathan ; Leake, Gerald ; Adam, T.N. ; Coolbaugh, Douglas D.
Author_Institution :
Res. Lab. of Electron., Massachusetts Inst. of Technol., Cambridge, MA, USA
Abstract :
We present on the demonstration of a number of critical device technologies including record low power modulators, tunable filters, and integrated lasers, along with the world´s largest silicon photonic circuit, integrated on a 300mm platform.
Keywords :
VLSI; integrated optics; optical filters; silicon; Si; VLSI-P; low power modulators; silicon photonic circuit; tunable filters; very large scale integrated photonics; Optical device fabrication; Optical filters; Optical sensors; Optical waveguides; Phased arrays; Silicon photonics;
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2014 Conference on
Conference_Location :
San Jose, CA
