• DocumentCode
    1772075
  • Title

    Efficient thermally tunable linear photonic crystal cavities in a zero-change microelectronics SOI CMOS process

  • Author

    Poulton, Christopher V. ; Xiaoge Zeng ; Wade, M.T. ; Shainline, J.M. ; Popovic, Milos A.

  • Author_Institution
    Dept. of Electr., Comput. & Energy Eng., Univ. of Colorado, Boulder, CO, USA
  • fYear
    2014
  • fDate
    8-13 June 2014
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    We demonstrate directly-doped Si tunable linear photonic crystal microcavities. Also the first tunable photonic crystals realized in an advanced (45nm) SOI CMOS microelectronics process with no in-foundry process changes, they show 0.63nm/mW tuning efficiency.
  • Keywords
    CMOS integrated circuits; elemental semiconductors; integrated optoelectronics; micro-optics; microcavities; photonic crystals; silicon; silicon-on-insulator; SOI CMOS microelectronics process; Si; directly-doped tunable linear photonic crystal microcavity; size 45 nm; thermally tunable linear photonic crystal cavity; tuning efficiency; zero-change microelectronics SOI CMOS process; CMOS integrated circuits; Cavity resonators; Doping; Optical buffering; Optical device fabrication; Optical imaging; Photonic crystals;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics (CLEO), 2014 Conference on
  • Conference_Location
    San Jose, CA
  • Type

    conf

  • Filename
    6989756
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1772075