Title :
Efficient thermally tunable linear photonic crystal cavities in a zero-change microelectronics SOI CMOS process
Author :
Poulton, Christopher V. ; Xiaoge Zeng ; Wade, M.T. ; Shainline, J.M. ; Popovic, Milos A.
Author_Institution :
Dept. of Electr., Comput. & Energy Eng., Univ. of Colorado, Boulder, CO, USA
Abstract :
We demonstrate directly-doped Si tunable linear photonic crystal microcavities. Also the first tunable photonic crystals realized in an advanced (45nm) SOI CMOS microelectronics process with no in-foundry process changes, they show 0.63nm/mW tuning efficiency.
Keywords :
CMOS integrated circuits; elemental semiconductors; integrated optoelectronics; micro-optics; microcavities; photonic crystals; silicon; silicon-on-insulator; SOI CMOS microelectronics process; Si; directly-doped tunable linear photonic crystal microcavity; size 45 nm; thermally tunable linear photonic crystal cavity; tuning efficiency; zero-change microelectronics SOI CMOS process; CMOS integrated circuits; Cavity resonators; Doping; Optical buffering; Optical device fabrication; Optical imaging; Photonic crystals;
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2014 Conference on
Conference_Location :
San Jose, CA
