Title :
AFM-based pick-and-place handling of individual nanoparticles inside an SEM for the fabrication of plasmonic nano-patterns
Author :
Mick, Uwe ; Banzer, Peter ; Christiansen, Silke ; Leuchs, Gerd
Author_Institution :
Max Planck Inst. for the Sci. of Light, Erlangen, Germany
Abstract :
Integrating AFM technology into an SEM enables the interactive assembling of individual nanoparticles by in-situ pick-and-place handling. We present a hardware setup and introduce examples for the nanofabrication of plasmonic patterns.
Keywords :
atomic force microscopy; nanofabrication; nanoparticles; plasmonics; scanning electron microscopy; AFM technology; AFM-based pick-and-place handling; SEM; hardware setup; in-situ pick-and-place handling; interactive assembling; nanoparticles; plasmonic nanopattern fabrication; Atomic force microscopy; Fabrication; Force; Nanoparticles; Plasmons; Scanning electron microscopy;
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2014 Conference on
Conference_Location :
San Jose, CA
