• DocumentCode
    1772286
  • Title

    AFM-based pick-and-place handling of individual nanoparticles inside an SEM for the fabrication of plasmonic nano-patterns

  • Author

    Mick, Uwe ; Banzer, Peter ; Christiansen, Silke ; Leuchs, Gerd

  • Author_Institution
    Max Planck Inst. for the Sci. of Light, Erlangen, Germany
  • fYear
    2014
  • fDate
    8-13 June 2014
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    Integrating AFM technology into an SEM enables the interactive assembling of individual nanoparticles by in-situ pick-and-place handling. We present a hardware setup and introduce examples for the nanofabrication of plasmonic patterns.
  • Keywords
    atomic force microscopy; nanofabrication; nanoparticles; plasmonics; scanning electron microscopy; AFM technology; AFM-based pick-and-place handling; SEM; hardware setup; in-situ pick-and-place handling; interactive assembling; nanoparticles; plasmonic nanopattern fabrication; Atomic force microscopy; Fabrication; Force; Nanoparticles; Plasmons; Scanning electron microscopy;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics (CLEO), 2014 Conference on
  • Conference_Location
    San Jose, CA
  • Type

    conf

  • Filename
    6989873
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1772286