Title :
Design and properties of nanostructured thick-film structures for sensor microelectronics
Author :
Klym, Halyna ; Hadzaman, Ivan ; Yurchak, Iryna
Author_Institution :
Specialized Comput. Syst. Dept., Lviv Polytech. Nat. Univ., Lviv, Ukraine
Abstract :
The temperature sensitive thick-film structures in different design of sensitive layers and separate temperature and humidity sensitive thick-film systems based on spinel-type NiMn2O4-CuMn2O4-MnCo2O4 manganites with p- and p+-types of electrical conductivity and insulating magnesium aluminate MgAl2O4 were prepared. Taking into account good properties of obtained elements, they can be applied for microelectronics application and as multifunctional integrated sensors for effective monitoring and control.
Keywords :
copper compounds; electrical conductivity; insulating thin films; magnesium compounds; manganese compounds; nanostructured materials; nickel compounds; semiconductor thin films; sensors; MgAl2O4; NiMn2O4-CuMn2O4-MnCo2O4; electrical conductivity; insulating magnesium aluminate; microelectronics application; multifunctional integrated sensors; nanostructured thick-film structures; sensor microelectronics; spinel-type manganites; temperature sensitive thick-film structures; Ceramics; Humidity; Resistance; Temperature; Temperature measurement; Temperature sensors; Thick films; nanostructures; sensors; spinel; thick films;
Conference_Titel :
Mixed Design of Integrated Circuits & Systems (MIXDES), 2014 Proceedings of the 21st International Conference
Conference_Location :
Lublin
Print_ISBN :
978-83-63578-03-9
DOI :
10.1109/MIXDES.2014.6872219
