• DocumentCode
    1777640
  • Title

    Impact of enhanced contact doping on minority carriers diffusion currents

  • Author

    Stefanucci, Camillo ; Buccella, Pietro ; Kayal, Maher ; Sallese, Jean Michel

  • Author_Institution
    Swiss Fed. Inst. of Technol. (EPFL), Lausanne, Switzerland
  • fYear
    2014
  • fDate
    June 30 2014-July 3 2014
  • Firstpage
    1
  • Lastpage
    4
  • Abstract
    Minority carriers diffusion currents are particularly important in parasitic substrate couplings of Smart Power ICs. In CMOS technologies the P-substrate potential is imposed by P+ contacts and N-wells by N+ highly doped implantations. The doping concentration discontinuity of these contact regions can have a big impact on parasitic diffusion currents of minority carriers. This work gives a description of these effects by device physical simulations of PN junctions under different injection levels of minority carriers. The perturbation of boundary conditions for electrons diffusion is also studied inside the substrate bulk in case a highly-doped substrate is used for high-voltage technologies.
  • Keywords
    CMOS integrated circuits; ion implantation; minority carriers; power integrated circuits; semiconductor doping; CMOS technology; N+ highly doped implantations; N-wells; P+ contacts; P-substrate potential; PN junctions; boundary condition perturbation; contact regions; device physical simulations; doping concentration discontinuity; electron diffusion; enhanced contact doping; high-voltage technology; highly-doped substrate; injection levels; minority carrier diffusion currents; parasitic diffusion currents; parasitic substrate couplings; smart power ICs; substrate bulk; Boundary conditions; Couplings; Doping; Integrated circuit modeling; Junctions; Semiconductor process modeling; Substrates;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Ph.D. Research in Microelectronics and Electronics (PRIME), 2014 10th Conference on
  • Conference_Location
    Grenoble
  • Type

    conf

  • DOI
    10.1109/PRIME.2014.6872738
  • Filename
    6872738